№4 2018


Ellipsometric control of parameters of multilayer Fe/Si nanostructures during growth


1I.A. Tarasov, 1I.A. Yakovlev, 1S.N. Varnakov, 1,2S.M. Zharkov, 1,2S.G. Ovchinnikov


1Kirensky Institute of Physics SB RAS, FRC KSC SB RAS
Krasnoyarsk, Russian Federation
2Siberian Federal University
Krasnoyarsk, Russian Federation


Using in situ single-wave laser ellipsometry method, the formation of the [Si/Fe57/Fe56]3/SiO2/Si(100) multilayer structure was studied. Information about the optical and structural properties of this structure was obtained. The change in the morphology of the surface of the growing layers and their optical characteristics are not identical for the cases of iron deposition on the surface of the silicon layer and deposition of silicon on the surface of the iron layer. The refractive index and coefficient of absorption indicate an increase of the thickness of transition layers containing iron-silicon solid solutions and silicides. The nature of the change in the optical constants become more complicated with each subsequent iron layer deposited on the silicon surface. The behavior of n and k profiles corresponding to the formation of silicon layers is simpler than the behavior of similar iron profiles. These profiles have only some features at the initial stages of growth and correspond to the formation of amorphous silicon layers. The obtained data are consistent with the data of transmission electron microscopy.


ellipsometry, iron silicides, multilayer Fe/Si nanostructures


[1] Ovchinnikov S. G., Varnakov S. N., Lyashchenko S. A., Tarasov I. A., Yakovlev I. A., Popov E. A., Zharkov S. M., Velikanov D. A., Tarasov A. S., Zhandun V. S., Zamkova N. G. Iron silicide-based ferromagnetic metal/semiconductor nanostructures // Physics of the Solid State, 2016, vol. 58, issue 11, pp. 2277–2281.

[2] Tokushige H., Endo T., Hiidome K., Saiki K., Kitamura Sh., Katsuyama T., Ikeda N., Sugimoto Yo., Maeda Yo. Photonic crystals composed of β-FeSi2 with amorphous Si cladding layers // Japanese Journal of Applied Physics, 2015, vol. 54, no. 7S2.

[3] Makita Yu., Ootsuka T., Fukuzawa Ya., Otogawa N., Abe H., Liu Zh., Nakayama Ya. β-FeSi2 as a Kankyo (Environmentally Friendly) semiconductor for solar cells in the space application // Proceedings of SPIE, 2006, vol. 6197. doi: 10.1117/12.664009

[4] Tarasov I. A., Popov Z. I., Varnakov S. N., Molokeev M. S., Fedorov A. S., Yakovlev I. A., Fedorov D. A., Ovchinnikov S. G. Optical characteristics of an epitaxial Fe3Si/Si(111) iron silicide film // JETP Letters, 2014, vol. 99, issue 10, pp. 565–569.

[5] Spesivtsev E. V., Rykhlitsky S. V., Shvets V. A. Razvitie metodov i sredstv opticheskoj ehllipsometrii v Institute fiziki poluprovodnikov SO RAN [Development of methods and means of optical ellipsometry at the Institute of Semiconductor Physics of the Siberian Branch of the Russian Academy of Sciences] // Autometry, 2011, no. 5, P. 5. (In Russian)

[6] Tarasov I. А., Lyashchenko S. A., Varnakov S. N., Ovchinnikov S. G., Yakovlev I. A., Kosyrev N. N. Sistema obrabotki i analiza dannyh odnovolnovoj kineticheskoj ehllipsometrii (SingleW) [System for processing and analyzing single-wavelength kinetic ellipsometry (SingleW)] // The Certificate on Official Registration of the Computer Program, no. 2013619178, 2013.

[7] Voronkova E. M., Voronkova E. M., Grechushnikov B. N., Distler G. I. Opticheskie materialy dlya infrakrasnoj tekhniki [Optical materials for infrared technology]. Moscow, Science, 1965, 346 p. (In Russian)

[8] Thutupalli G. K. M., Tomlin S. G. The optical properties of amorphous and crystalline silicon // Journal of Physics C: Solid State Physics, 1977, vol. 10, P. 467.

[9] Johnson P. B., Christy R. W. Optical constants of transition metals: Ti, V, Cr, Mn, Fe, Co, Ni and Pd // Physical Review B, 1973, vol. 9, pp. 5056-5070.

[10] Naik S. R., Rai S., Chattopadhyay M. K., Sharma V. K., Majumdar S., Lodha G. S. Structural and transport properties of ferromagnetically coupled Fe/Si/Fe trilayers // Journal of Applied Physics, 2008, vol. 104, issue 6, P. 063525.

For citing this article

Tarasov I.A., Yakovlev I.A., Varnakov S.N., Zharkov S.M., Ovchinnikov S.G. Ellipsometric control of parameters of multilayer Fe/Si nanostructures during growth // Spacecrafts & Technologies, 2018, vol. 2, no. 4, pp. 220-224. doi: 10.26732/2618-7957-2018-4-220-224

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